MEMS红外转换薄膜光驱动技术研究

Micro-electro-mechanical system (MEMS) infrared conversion film, which can convert write visible light images into infrared images, is widely used in infrared target simulators. When an infrared focal plane detector is docking with an infrared target simulator, the integration time of detector must be greater than the display time of infrared image to collect all the gray scales of infrared image. A light-driven technology based on MEMS infrared conversion film is proposed in this paper. Energy of write visible light image is integrated with thermal inertia of the film, which reduces requirement for integration time of infrared detector. Temperature characteristics of the film in the light-driven state are simulated and tested. Results show that the gray value of infrared image generated by the film is linearly related to that of write visible light image. The infrared image has heating time of 9 ms, keeping time of 1 ms, and cooling time of 10 ms. The detector can get a 256 gray-scale infrared image by integrating for any period during keeping time. The maximum temperature rise of infrared image is 112 K, and the temperature resolution corresponding to the unit gray value of infrared image is 0.44 K.