Dependance of Gauge Factor on Micro-Morphology of Sensitive Grids in Resistive Strain Gauges

The effect of micro-morphology of resistive strain gauges on gauge factor was investi-gated numerically and experimentally. Based on the observed dimensional parameters of various commercial resistive strain gauges, a modeling method had been proposed to reconstruct the rough sidewall on the sensitive grids. Both the amplitude and period of sidewall profiles are normalized by the sensitive grid width. The relative resistance change of the strain gauge model with varying sidewall profiles was calculated. The results indicate that the micro-morphology on the sidewall profile led to the deviation of the relative resistance change and the decrease in gauge factor. To verify these conclusions, two groups of the strain gauge samples with different qualities of sidewall profiles have been manufactured, and both their relative resistance changes and gauge factors were measured by a testing apparatus for strain gauge parameters. It turned out that the experimental results are also consistent with the simulations. Under the loading strain within 1000 µm/m, the average gauge factors of these two groups of samples are 2.126 and 2.106, respectively, the samples with rougher profiles have lower values in gauge factors. The reduction in the gauge factor decreases the sensitivity by 2.0%. Our work shows that the sidewall micro-morphology on sensitive grids plays a role in the change of the gauge factor. The observed phenomena help derive correction methods for strain gauge measurements and predict the measurement errors coming from the local and global reinforcement effects.