用于移相干涉的高精度可伸缩PZT驱动电源技术

Aiming at the problem that the existing 3-PZT phase-shifter is difficult to drive the large-aperture reference mirror for phase-shifting interferometry, a high-precision piezoelectric ceramic driving power supply for the measured element phase-shifting interferometry system is designed. The power supply that adopts error-amplification structure outputs the control signal through the proportion difference and optocoupler isolation according to the deviation between the input signal and the output sampling, and then controls the conduction state of MOSFET, adjusts the charge and discharge current, and controls the output of the DC voltage generated by the voltage doubling rectifier circuit, so as to realize the stable control of the output voltage of the driving power supply. Experiments show that the high-precision piezoelectric ceramic driving power supply has the ability that outputs continuously adjustable voltage in the range of -600~600V, and has ripple less than 20mV, high linearity and accuracy, good stability. It can realize the retractable and accurate phase-shifting of piezoelectric ceramics, and can meet the requirements of the surface measurement of the large-aperture measured mirror by the measured element phase-shifting interferometry system.