微结构形貌的光场显微三维重构分辨率增强技术

Scanning based measurement techniques are the mainstream techniques for topography reconstruction of the micro structure surface. These techniques have strong dependence on high-precision mechanical scan, which means much time cost for the measurement process. By combining light field microscopy and Fourier Ptychography Microscopy (FPM), a 3D reconstruction technique with enhanced resolution is proposed. An optical coding element is added in the conventional microscope optical path, and the optical slice images of the measured object can be obtained with a single shot. FPM algorithm realizes the enhancement of the lateral resolution of the slice images, which overcomes the resolution loss in the light field imaging technique. Experiments show that the 3D reconstruction technique proposed has a good prospect for the on-line measurement of micro structure surface processing.