Terahertz Devices with EMXT Structure Fabricated by MEMS

Shengjie Yang; Hongda Lu; Zhipeng Liu; Yong Liu; Bin Li; Xin Lv

doi:10.1109/ICMMT.2018.8563681

Terahertz Devices with EMXT Structure Fabricated by MEMS

Shengjie Yang, Hongda Lu, Zhipeng Liu, Yong Liu, Bin Li, Xin Lv

School of Integrated Circuits and Electronics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

Due to the micro-dimension of terahertz devices and antennas, it requires more stringent processing technology. Micro-Electro-Mechanical Systems (MEMS) used to fabricate terahertz functional devices and antennas is a good choice for the high accuracy, good consistence and low cost. In this paper, one approach to obtain antennas and passive devices in terahertz band is proposed, which based on electromagnetic crystal structure and MEMS technology. The band-pass filter, 90° bend waveguide and H-plane horn antenna operating at terahertz band are presented as examples. All of them have good agreement between simulation and measurement.

Original language	English
Title of host publication	2018 International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781538624166
DOIs	https://doi.org/10.1109/ICMMT.2018.8563681
Publication status	Published - 5 Dec 2018
Event	10th International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 - Chengdu, China Duration: 6 May 2018 → 9 May 2018

Publication series

Name	2018 International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 - Proceedings

Conference

Conference	10th International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018
Country/Territory	China
City	Chengdu
Period	6/05/18 → 9/05/18

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10.1109/ICMMT.2018.8563681

Cite this

Yang, S., Lu, H., Liu, Z., Liu, Y., Li, B., & Lv, X. (2018). Terahertz Devices with EMXT Structure Fabricated by MEMS. In 2018 International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 - Proceedings Article 8563681 (2018 International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICMMT.2018.8563681

Yang, Shengjie ; Lu, Hongda ; Liu, Zhipeng et al. / Terahertz Devices with EMXT Structure Fabricated by MEMS. 2018 International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2018. (2018 International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 - Proceedings).

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title = "Terahertz Devices with EMXT Structure Fabricated by MEMS",

abstract = "Due to the micro-dimension of terahertz devices and antennas, it requires more stringent processing technology. Micro-Electro-Mechanical Systems (MEMS) used to fabricate terahertz functional devices and antennas is a good choice for the high accuracy, good consistence and low cost. In this paper, one approach to obtain antennas and passive devices in terahertz band is proposed, which based on electromagnetic crystal structure and MEMS technology. The band-pass filter, 90° bend waveguide and H-plane horn antenna operating at terahertz band are presented as examples. All of them have good agreement between simulation and measurement.",

author = "Shengjie Yang and Hongda Lu and Zhipeng Liu and Yong Liu and Bin Li and Xin Lv",

note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 10th International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 ; Conference date: 06-05-2018 Through 09-05-2018",

year = "2018",

month = dec,

day = "5",

doi = "10.1109/ICMMT.2018.8563681",

language = "English",

series = "2018 International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 - Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2018 International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 - Proceedings",

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}

Yang, S, Lu, H, Liu, Z, Liu, Y, Li, B & Lv, X 2018, Terahertz Devices with EMXT Structure Fabricated by MEMS. in 2018 International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 - Proceedings., 8563681, 2018 International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 10th International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018, Chengdu, China, 6/05/18. https://doi.org/10.1109/ICMMT.2018.8563681

Terahertz Devices with EMXT Structure Fabricated by MEMS. / Yang, Shengjie; Lu, Hongda; Liu, Zhipeng et al.
2018 International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2018. 8563681 (2018 International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Terahertz Devices with EMXT Structure Fabricated by MEMS

AU - Yang, Shengjie

AU - Lu, Hongda

AU - Liu, Zhipeng

AU - Liu, Yong

AU - Li, Bin

AU - Lv, Xin

PY - 2018/12/5

Y1 - 2018/12/5

N2 - Due to the micro-dimension of terahertz devices and antennas, it requires more stringent processing technology. Micro-Electro-Mechanical Systems (MEMS) used to fabricate terahertz functional devices and antennas is a good choice for the high accuracy, good consistence and low cost. In this paper, one approach to obtain antennas and passive devices in terahertz band is proposed, which based on electromagnetic crystal structure and MEMS technology. The band-pass filter, 90° bend waveguide and H-plane horn antenna operating at terahertz band are presented as examples. All of them have good agreement between simulation and measurement.

AB - Due to the micro-dimension of terahertz devices and antennas, it requires more stringent processing technology. Micro-Electro-Mechanical Systems (MEMS) used to fabricate terahertz functional devices and antennas is a good choice for the high accuracy, good consistence and low cost. In this paper, one approach to obtain antennas and passive devices in terahertz band is proposed, which based on electromagnetic crystal structure and MEMS technology. The band-pass filter, 90° bend waveguide and H-plane horn antenna operating at terahertz band are presented as examples. All of them have good agreement between simulation and measurement.

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U2 - 10.1109/ICMMT.2018.8563681

DO - 10.1109/ICMMT.2018.8563681

M3 - Conference contribution

AN - SCOPUS:85060235718

T3 - 2018 International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 - Proceedings

BT - 2018 International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 10th International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018

Y2 - 6 May 2018 through 9 May 2018

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Yang S, Lu H, Liu Z, Liu Y, Li B, Lv X. Terahertz Devices with EMXT Structure Fabricated by MEMS. In 2018 International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2018. 8563681. (2018 International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 - Proceedings). doi: 10.1109/ICMMT.2018.8563681

Terahertz Devices with EMXT Structure Fabricated by MEMS

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