Fabrication and characterization of a high Q-factor microcantilever enhanced by lead zirconate titanate thick film

Quanliang Zhao; Zhongxiang Li; Guangping He; Maosheng Cao; Dawei Wang; Jiejian Di

doi:10.7521/j.issn.0454-5648.2014.01.12

Fabrication and characterization of a high Q-factor microcantilever enhanced by lead zirconate titanate thick film

Quanliang Zhao^*, Zhongxiang Li, Guangping He, Maosheng Cao, Dawei Wang, Jiejian Di

^*Corresponding author for this work

School of Material Science and Engineering

North China University of Technology

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

A microcantilever actuated by 2.5-mm-thick lead zirconate titanate (PZT) film was fabricated by a bulk silicon micromachining technique and a sol-gel route. The results show that the fundamental resonant frequency is 199.63 kHz, which is similar to the theoretical result. The mechanical quality factor (Q-factor) is 799 even under standard atmospheric pressure condition. According to the analysis of energy dissipation mechanism, the PZT thick film can improve the Q-factor of the resonator due to the great effective elastic modulus and the "hard" property. These results imply that the PZT thick film could have a promising application in high Q-factor microelectromechanical devices.

Original language	English
Pages (from-to)	65-69
Number of pages	5
Journal	Kuei Suan Jen Hsueh Pao/ Journal of the Chinese Ceramic Society
Volume	42
Issue number	1
DOIs	https://doi.org/10.7521/j.issn.0454-5648.2014.01.12
Publication status	Published - Jan 2014

Keywords

Lead zirconate titanate
Mechanical quality factor
Microcantilever
Thick film

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10.7521/j.issn.0454-5648.2014.01.12

Cite this

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abstract = "A microcantilever actuated by 2.5-mm-thick lead zirconate titanate (PZT) film was fabricated by a bulk silicon micromachining technique and a sol-gel route. The results show that the fundamental resonant frequency is 199.63 kHz, which is similar to the theoretical result. The mechanical quality factor (Q-factor) is 799 even under standard atmospheric pressure condition. According to the analysis of energy dissipation mechanism, the PZT thick film can improve the Q-factor of the resonator due to the great effective elastic modulus and the {"}hard{"} property. These results imply that the PZT thick film could have a promising application in high Q-factor microelectromechanical devices.",

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AU - Zhao, Quanliang

AU - Li, Zhongxiang

AU - He, Guangping

AU - Cao, Maosheng

AU - Wang, Dawei

AU - Di, Jiejian

PY - 2014/1

Y1 - 2014/1

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AB - A microcantilever actuated by 2.5-mm-thick lead zirconate titanate (PZT) film was fabricated by a bulk silicon micromachining technique and a sol-gel route. The results show that the fundamental resonant frequency is 199.63 kHz, which is similar to the theoretical result. The mechanical quality factor (Q-factor) is 799 even under standard atmospheric pressure condition. According to the analysis of energy dissipation mechanism, the PZT thick film can improve the Q-factor of the resonator due to the great effective elastic modulus and the "hard" property. These results imply that the PZT thick film could have a promising application in high Q-factor microelectromechanical devices.

KW - Lead zirconate titanate

KW - Mechanical quality factor

KW - Microcantilever

KW - Thick film

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Fabrication and characterization of a high Q-factor microcantilever enhanced by lead zirconate titanate thick film

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Keywords

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