@inproceedings{2aac22254c2c4d4994e1adbd563d6c1f,
title = "Applications of wavefront modulation devices in aspheric and freeform measurement",
abstract = "Wavefront modulation devices are of great significance in optical information processing systems. These devices capable of phase modulation are used in a variety of optical applications: wavefront correction, optical metrology, adaptive optics, aberration compensation, etc. The liquid crystal spatial light modulators (LC-SLMs) and deformable mirrors (DMs) have been regarded as the promising device for their flexibility and programmability on wavefront modulations. This paper presents applications of LC-SLMs and DMs when they are used as aberration compensators in testing of aspheric and freeform. Besides, a pixel-wise method based on analysis of the phase maps obtained by a Fizeau interferometer for calibrating the phase modulation characteristics of the LC-SLM is proposed. A PLUTO-VIS-020 LC-SLM produced by the Holoeye Company is employed in the calibrating experiment. A Zygo interferometer based on Fizeau interference theory is also employed. The experimental results demonstrate that the phase modulation characteristics of LC-SLM and a specific lookup table (LUT) for every pixel of the LC-SLM aperture can be obtained by utilizing the proposed method with convenience and high efficiency. The device calibrated in this paper provides a high phase shift up to 6π at 632.8nm wavelength and has a linearized phase distribution. It coincides well with the average modulation curve offered in the manual of the device. This paper provides a simple and accurate method for pixel-wise phase modulation characteristics calibration.",
keywords = "deformable mirrors, liquid crystal spatial light modulators, phase modulation characteristics, pixel-wise method, wavefront modulation devices",
author = "Qun Hao and Yan Ning and Yao Hu",
note = "Publisher Copyright: {\textcopyright} 2019 SPIE.; 10th International Symposium on Precision Engineering Measurements and Instrumentation, ISPEMI 2018 ; Conference date: 08-08-2018 Through 10-08-2018",
year = "2019",
doi = "10.1117/12.2511949",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Jie Lin and Jiubin Tan",
booktitle = "Tenth International Symposium on Precision Engineering Measurements and Instrumentation",
address = "United States",
}