TY - GEN
T1 - A High-Speed Confocal Laser Endomicroscope Using an Electrothermal Mems Mirror Actuated in Linear-Near Resonant Raster Scan
AU - Pan, Teng
AU - Qi, Ting Xiang
AU - Yang, Hengzhang
AU - Pu, Jia
AU - Chen, Qian
AU - Xie, Huikai
N1 - Publisher Copyright:
© 2024 IEEE.
PY - 2024
Y1 - 2024
N2 - Confocal laser endomicroscopy has profound impact in precision medicine, but is still facing challenges of ensuring high-speed in vivo imaging and guaranteeing safety. Electrothermal micromirrors typically have large linear angular scan range at low actuation voltage, allowing the safe laser scanning imaging. This paper reports a confocal endomicroscope using a two-axis electrothermal MEMS mirror actuated in near resonance to achieve a stable high-speed imaging. Fluorescent beads and micromachined patterns are used to test the probe performances. Experiments show that the lateral resolution is 4.15 μm and the field of view is about 300×800 μm2. The imaging speed can be set from 1 fps to 20 fps with different pixel resolutions. In a linear-near resonant mode, the imaging frame rate of the probe is 20 times faster than that of a linear-linear mode at the same pixel numbers.
AB - Confocal laser endomicroscopy has profound impact in precision medicine, but is still facing challenges of ensuring high-speed in vivo imaging and guaranteeing safety. Electrothermal micromirrors typically have large linear angular scan range at low actuation voltage, allowing the safe laser scanning imaging. This paper reports a confocal endomicroscope using a two-axis electrothermal MEMS mirror actuated in near resonance to achieve a stable high-speed imaging. Fluorescent beads and micromachined patterns are used to test the probe performances. Experiments show that the lateral resolution is 4.15 μm and the field of view is about 300×800 μm2. The imaging speed can be set from 1 fps to 20 fps with different pixel resolutions. In a linear-near resonant mode, the imaging frame rate of the probe is 20 times faster than that of a linear-linear mode at the same pixel numbers.
KW - Electrothermal MEMS mirror
KW - confocal laser endomicroscopy
KW - near resonant actuation
UR - http://www.scopus.com/inward/record.url?scp=85186638451&partnerID=8YFLogxK
U2 - 10.1109/MEMS58180.2024.10439502
DO - 10.1109/MEMS58180.2024.10439502
M3 - Conference contribution
AN - SCOPUS:85186638451
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 425
EP - 428
BT - IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024
Y2 - 21 January 2024 through 25 January 2024
ER -