Abstract
Interferometry has a high measurement accuracy and a wide range of applications in the existing surface inspection methods of optical components. Fabrication and alignment errors in the interferometer reduces the accuracy of surface inspection. A multi-point calibration method of an actual interferometer system using a Shaker-Hartmann wavefront sensor is proposed. The correction of the virtual interferometer system is implemented in the optical design software ZEMAX using wavefront calibration data. Combined with digital Moiré phase-shifting algorithm, the influence of the fabrication and alignment errors in the actual interferometer are eliminated. A planar mirror and a deformable mirror are selected as the test mirrors for surface shape measurement experiments. The results show that the measurement accuracy of the digital Moiré phase-shifting interferometer system after calibration and correction is improved. Compared with the measurement results of the Zygo interferometer, the surface shapes are consistent and the peak-to-valley (PV) error difference is within 0.07λ (λ=532 nm).
| Translated title of the contribution | Research on multi-point error calibration and correction of digital moiré phase-shifting interferometer |
|---|---|
| Original language | Chinese (Traditional) |
| Pages (from-to) | 77-84 |
| Number of pages | 8 |
| Journal | Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument |
| Volume | 39 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - 1 Oct 2018 |